Thermal validation tool

We developed the concept for a thermal validation tool for the semiconductor industry: a thermally insulated room that maintains an exceptionally stable environment (within a few millikelvin per hour) to verify the performance of a lithography machine module. Using a model, we compared multiple architectures and performed sensitivity analyses to understand how parameters such as wall and cavity thickness, airflow/flow variation, and control settings influence stability. The simulation results guided key design trade-offs, identified dominant heat paths, and de-risked the concept before hardware. Outcome: a validated design that meets the milliKelvin-per-hour stability target and a clear specification baseline for detailed engineering and build.

Thermal tool
Thermal tool
Simscape model of the thermal tool
Challenges
Challenges

  • Thermal stability of a few millikelvin per hour

Competences
Competences

  • Thermal analysis
  • Mechanical design

Coorperation
Coorperation

  • ZEST Innovate

projects

Success stories

Take a look at a selection of our engineering projects, where we create smart and practical solutions designed to tackle specific challenges in different industries.