Thermal validation tool

We developed the concept for a thermal validation tool for the semiconductor industry: a thermally insulated room that maintains an exceptionally stable environment (within a few millikelvin per hour) to verify the performance of a lithography machine module. Using a model, we compared multiple architectures and performed sensitivity analyses to understand how parameters such as wall and cavity thickness, airflow/flow variation, and control settings influence thermal stability. The simulation results guided key design trade-offs, identified dominant heat paths, and de-risked the concept before hardware, supporting robust mechanical design and precision system engineering. Outcome: a validated design that meets the milliKelvin-per-hour stability target and a clear specification baseline for detailed engineering and build, developed in cooperation with ZEST Innovate.

perspective of the industrial gearbox test bench in cooperation with ZEST Innovate showing aluminum framing and integrated equipment
Right perspective of the industrial gearbox test bench in cooperation with ZEST Innovate highlighting the structural layout and installation area
Simscape model of the thermal tool
Challenges
Challenges

  • Thermal stability of a few millikelvin per hour

Competences
Competences

  • Thermal analysis
  • Mechanical design

Coorperation
Coorperation

  • ZEST Innovate

projects

Success stories

Take a look at a selection of our engineering projects, where we create smart and practical solutions designed to tackle specific challenges in different industries.