To ensure the performance and reliability of a newly developed module for an advanced lithography machine, we designed and built a dedicated verification tool. This custom-built multi-axis system precisely simulates the conditions and operating environment in which the module will ultimately function.

The verification tool enables comprehensive testing by performing high-resolution measurements of key performance parameters such as positioning accuracy, repeatability, and throughput. By  replicating the mechanical, thermal, and kinematic conditions of the target application, it allowed our customer to identify deviations from the design specifications early in the development process.