Technology
High-precision linear motion stage display showcased during Machine Build and Test procedures

Designing Flexure Stages for Sub-Micrometre Accuracy

A flexure stage reaches sub-micrometre accuracy when elastic deformation replaces sliding joints, Abbe offsets are minimized, stiffness ratios exceed 500 to 1, and the metrology loop is short. Success depends on topology choice, spring stiffness math, material control, and tolerancing more than on the actuator. Sub-micrometre accuracy is not an exotic speciality anymore. Semiconductor handling, […]