Verification tool for semicon industry

Design of a verification tool for testing the specifications of new developed module of a lithography machine. This tool, a multi-axis system, fully replicates the conditions in which the module will operate. It performs a series of measurements to determine whether the design meets the intended performance expectations.

Challenges

Multi-axis system with stringent timing and repeatability
Precise positioning
Camera system for inspection

Comptences

Concept & detailed design
Mechatronics & Optics

Coorperation

ZEST Innovate

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